I-Screening Electron Microscope (SEM)
Iprojekthi | Ipharamitha | ||
Inkqubo ye-Electron Optical | Uhlobo lweSibhamu se-Electron | Isibhamu se-electron se-tungsten filament esisembindini ngaphambili | |
Isisombululo | I-Vacuum ephezulu | 5nm@10kV(SE) | |
3nm@30kV(SE) | |||
8nm@3kV(SE) | |||
Ukwandiswa | 1–300,000× (ukwandiswa okusisiseko) | ||
1–16× (ukwandiswa kwe-optical) | |||
I-Voltage yokukhawulezisa | 0.2kV~30kV | ||
Inkqubo yokuFanekisa | Isitshicileli | Isitshicileli se-electron sesibini (ETD) | |
| Isikhangeli se-electron esijikelezileyo Umtshini we-electron wesibini ophantsi we-vacuum I-Energy dispersive spectroscopy (EDS), njl. | |||
Ifomathi yokugcina umfanekiso | I-TIFF, i-JPG, i-BMP, i-PNG, ukuya kuthi ga kwi-48k*32k | ||
Uqwalaselo | Umsebenzi wokukhangela obonakalayo, oxhotyiswe ngekhamera ye-CCD ethe tye kunye nekhamera ethe nkqo | ||
Inkqubo yokuVutha | Imo yoVutha | I-Vacuum ephezulu | Ingcono kune-5×10⁻⁴ Pa |
Umshini ophantsi wokucoca umoya | 5~1000Pa | ||
Indlela yoLawulo | Ulawulo oluzenzekelayo ngokupheleleyo | ||
Igumbi leSampulu | Ikhamera | Ukuhambahamba okubonakalayo | |
Ukubeka iliso kwigumbi lesampulu | |||
Uqwalaselo lweSigaba seSampulu | Isigaba sesampulu esizenzekelayo ngokupheleleyo esine-axis ezi-5 kunye noyilo lwangaphakathi olufakwe ngokupheleleyo | ||
Uluhlu lokuHamba | X:120 mm | ||
KWAYE:115 mm | |||
NE:50 mm | |||
R (Ukujikeleza): 360° ihlengahlengiswa rhoqo | |||
T:-10°~+90° | |||
Isampulu yoBuchule beChamber | Ububanzi: 340 mm Ukuphakama: 274 mm Ubunzulu: 295 mm | ||
Ubungakanani obukhulu beSampuli | Ububanzi: 270 mm Ukuphakama: 53 mm | ||


