Umshini Wokuhlola Ukuvuza Kwe-Helium Wesibili
Isivivinyo sesibili sokuvuza kwe-helium sisetshenziselwa ukuhlolwa kokuvala ibhethri ngemva kwenqubo yokushisela izinzipho. Indlela yokuhlola iyindlela yokuthola ukuvuza kwe-vacuum helium (igesi ye-helium isivele ikhona ngaphakathi kwebhethri engenayo, futhi ngokuphuma ekamelweni lokuhlola, izinga lokuvuza kwe-helium esikhathini esithile liyalinganiswa ukuze kutholakale ubuqotho bokuvala ibhethri ngemva kokushisela). Le mishini izenzakalelayo ngokuphelele, iqeda ngokuzenzakalelayo imisebenzi efana nokulayisha nokukhipha impahla, ukutholwa kokuvuza kwe-helium, ukususwa kwe-helium, kanye nokwahlukaniswa ngokuzenzakalelayo kwemikhiqizo ye-NG.
Izinzuzo:
- - Indlela yokuthola ukuvuza kwe-helium nge-vacuum, ukunemba okuphezulu kokuthola, ukuthola ngempumelelo ukuvuza okuncane.
- - Izinga eliphezulu lokuzenzakalela, okuvumela ukuhlolwa kweqembu okusheshayo.
- - Ukuqina okuhle kwemishini, kanye namaphutha amancane okuphindaphinda ekuhlolweni.
| Amapharamitha Obuchwepheshe | Amamethrikhi Anenzuzo |
| Ubulukhuni bomphezulu wegumbi | Ubulukhuni bodonga lwangaphakathi lwegumbi ≤ Ra0.8 |
| Izinga lokuvuza kokupompa nge-vacuum | Igumbi lokuhlanza elimpompelwe ku-20 Pa, libambe imizuzu emi-2, ngesilinganiso sokuvuza ≤ 50 Pa/min phakathi nomzuzu owodwa olandelayo |
| Izinga lokuvuza kwe-Helium |
|
| Ububanzi bezinga lokuvuza kwesitholi sokuvuza se-Helium | 1.0*10-12 kuya ku-1.0*10-3 Pa*m3/s |
| Izinga elihle elingamanga | Akukho ukuvuza okuphuthelwe, izinga lokudlula umkhawulo ≤ 0.5% |
| Ububanzi bokubonisa be-detector yokuvuza | 1×10⁻¹³～1×10⁻³ Pa·m³/s |
| Izinga eliphansi lokuvuza elitholakalayo | 5×10-13Pa·m3/s |
| Ubuqotho bokutywinwa kwegumbi | Igumbi lokuhlanza elifakwe ku-vacuum lifakwe ku-20 Pa, libambe imizuzu emi-2 ngaphambi kokuqala isivivinyo. Eminithini eli-1 elilandelayo, ukwehla kwengcindezi yegumbi lokuhlola kufanele kube ngu-≤ 50 Pa. |
| Izidingo zendandatho yokuvala | Umjikelezo wokuhlanza indandatho yokuvala yegumbi lokuthola ≥ amahora angu-8, impilo yesevisi ≥ izinyanga ezi-3 |