Muchina wechipiri wekuyedza weHelium Leak
Muchina wekuyedza kubuda kwehelium unoshandiswa pakuyedza bhatiri mushure mekusunga chipikiri. Nzira yekuyedza ndiyo nzira yekuona kubuda kwehelium (gasi rehelium rinenge ratovepo mukati mebhatiri rinouya, uye nekubvisa mukamuri yekuyedza, mwero wekubuda kwehelium kwenguva yakatarwa unoyerwa kuti uone kusimba kwebhatiri mushure mekusunga). Muchina uyu unoshanda otomatiki, uchipedzisa mabasa akadai sekurodha nekuburitsa zvinhu, kuona kubuda kwehelium, kubvisa helium, uye kuzviparadzanisa otomatiki kwezvigadzirwa zveNG.
Zvakanakira:
- - Nzira yekuona kubuda kwemvura mu helium, kunyatsoona kwakanyatsojeka, kuona kubuda kwemvura kudiki zvinobudirira.
- - Kushanda otomatiki kwepamusoro, zvichiita kuti bvunzo dzema "batch" dzikurumidze.
- - Kugadzikana kwemidziyo zvakanaka, uye zvikanganiso zvishoma zvinodzokororwa pakuedzwa.
| Magadzirirwo ehunyanzvi | Zviyero Zvinobatsira |
| Kuomarara kwenzvimbo yekamuri | Kukombama kwemadziro emukati mekamuri ≤ Ra0.8 |
| Mwero wekubuda kwemvura mupombi ye vacuum | Kamuri remuchina wekubvisa mvura rakapombwa kusvika pa20 Pa, chengeta kwemaminitsi maviri, uye mwero wekubuda kwemvura ≤ 50 Pa/min mukati meminiti imwe inotevera |
| Mwero wekubuda kwemvura muHelium |
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| Chinoongorora kubuda kwemhepo cheHelium chinoratidza kudonha kwehuwandu hwemvura inobuda | 1.0*10-12 kusvika 1.0*10-3 Pa*m3/s |
| Mwero wenhema wakanaka | Hapana kubuda kwemvura kwakarasika, huwandu hwemvura yakawandisa ≤ 0.5% |
| Nzvimbo yekuratidza detector inodonhedza mvura | 1×10⁻¹³～1×10⁻³ Pa·m³/s |
| Mwero wekudzikira kwemvura unoonekwa zvishoma | 5×10-13Pa·m3/s |
| Kuvimbika kwekuisa chisimbiso chekamuri | Kamuri remuchina wekubvisa mvura rakapombwa kusvika pa20 Pa, mira kwemaminitsi maviri usati watanga bvunzo. Muminiti imwe inotevera, Kuderera kwekumanikidzwa kwekamuri yekuyedza kunofanira kuva ≤ 50 Pa. |
| Zvinodiwa zvemhete yekuisa chisimbiso | Kuchenesa mhete yechisimbiso kwekamuri rekuona ≥ maawa masere, hupenyu hwebasa ≥ mwedzi mitatu |